- Laser scanning system
- 20X objective lens
- 30mm X 30mm working area
- x, y, z linear motorized stage
- Vacuum chuck
- System control computer
- Power meter
- Laser safety glasses

- Continues Wave fiber laser
- Wave length: 1064nm
- Maximum power: 50W
- Mode: TEM00 Gaussian
- Minimum spot size: 25μm

- Nano-second pulse fiber laser
- Wave length: 1064nm
- Average power: 20W
- Pulse width: 4, 8, 14, 20, 30, 50, 100, 200 nm
- Maximum energy per pulse at 4ns: 40μJ
- Mode: TEM00 Gaussian
- Minimum spot size: 20μm

- TTL input and output, 50Ω output
- Sampling rate: 250MS/s
- Maximum frequency: 25MHz
- Run mode: continuous, Modulation, sweep, burst
- Function: sine, square, ramp, pulse, arb

- 200 ~ 1100nm measurement range
- Reflection(specular, diffusion), transmission mode Minimum 260 sampling per second
- Laser safety glasses

- x, y, z precision manual stage
- 50X, 100X, 200X, 500X, 1000X magnification
- Bright focus, dark focus
- Polarization filter
- Auto, manual illumination control
- CCD image capture software

- Grinding, lapping and polishing
- Disc sizes: 200 mm, 250 mm and 300 mm dia.
- Speed: 50 ~ 500 rpm
- Automatic unit

- 230 x 135 x 105 mm
- Capacity: 3.3 L
- Frequency: 40 KHz
- Time range: 1 ~ 99 min
- Temp. range: Ambient ~ 60℃

- Temp. range: Ambient +5 ~ 250 ℃
- Time range: ~ 99 Hr 59 Min
- Vacuum resistan: 0 ~ 76 cmHg
- Internal: 200 x 200 x 200 mm - Capacity: 8 L